Products
hallmark
- Contaminants and defects at the nanometer scale can be evaluated transparently.
- Single shot instantaneous depth information
- High-speed measurement without focusing
- Non-destructive, non-contact and non-invasive measurements
- High-speed scanning of any surface for easy determination of the measurement position
norm
Resolution x, y | 691 nm (single), 488 nm (component) | |||
Field of view x, y | 700 x 700 microns | |||
Resolution z | 10 nm (delayed) | |||
Digital refocusing range z | ± 700 microns | |||
sample size | 100×80×t20 mm | |||
(when connected to a multifunctional sample holder) | ||||
sample stage | Automatic XY Carrier Stage for Fine Tuning | |||
X: ±10 mm Y: ±10 mm | ||||
Carrier table for coarse adjustment | ||||
X: 129 mm Y: 85 mm | ||||
lasers | Wavelength 638 nm | |||
Output 0.39 mW or less, Class1 | ||||
(intensity of irradiation of the sample) | ||||
descriptive | Main body: 505 (W) x 630 (D) x 439 (H) | |||
(Width x Depth x Height) mm | ||||
weights | 41 kg | |||
power wastage | Mainframe: 290 VA | |||
*Excludes PCs and accessories. |
appliance
Nano-order shape information can be obtained in a non-contact, non-destructive and non-invasive manner. Acquiring depth-direction information from a single shot allows visualization and quantification of the cross-sectional shape of scratches as well as defects invisible to the naked eye on the surface of transparent films.
The filler inside the transparent film can be observed in a single shot, which is invisible to the naked eye. In addition, by changing the focus in the direction of depth after measurement, the filler at each depth can be recognized.