Product Overview
The 4K closed-cycle cryogenic probe station plays a vital role in scientific research and technology development. It is capable of performing various non-destructive physical and electrical property tests on samples in a low-temperature environment, which helps researchers gain an in-depth understanding of the physical and electrical properties of materials or devices, thus providing important data support for the development and application of new materials.
The PSM-4K series cryogenic probe station is a high performance closed-cycle cryogenic probe station with a compact and low vibration design that provides a <5K-350K high and low temperature vacuum test environment for electrical parameter testing of semiconductor chips. It utilizes closed-cycle refrigeration, eliminating the need for liquid helium, and has a temperature of 4.5K.
specificities
- 4.5 K using closed-cycle refrigeration without liquid helium consumption.
- Displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing different devices on the sample to be switched for testing without destroying the vacuum.
- Unique probe arm X-Y-Z-R four-dimensional adjustment to accommodate testing of 4-inch samples.
- The vacuum cavity is made of aluminum, which can effectively reduce the external electromagnetic interference and improve the accuracy and stability of the test.
- The probe arm adopts tri-coaxial connector with good leakage performance, measured leakage current is less than 100fA @ 1V@4.5K-350K.
- Wide test temperature range, support 4.5K-350K continuous temperature change.
- Uniquely designed flexible probe, the probe is mounted on a copper elastomer, avoiding excessive force during lancing to cause damage to the sample or electrode.
Technical Parameters
Parameters and indicators:
Probe Station Mainframe Classification | ||
model number | PSM-4K-2 | PSM-4K-4 |
temperature range | 4.5K-350K | 4.5K-350K |
Temperature stability | +/-50mK | |
vibratory | <1μm | |
Specimen Holder | ||
Types and Materials | Oxygen-free copper grounded gold-plated sample holders | |
sizes | 2 inch | 4 |
Optional specifications |
Insulated sample holders (temperature only up to 350K)
Coaxial sample holder (temperature only up to 350K)
Triple coaxial sample holder (temperature only up to 350K)
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probe arm | ||
typology | DC Probe Arm | |
quantities | 4 | |
Connectors and Cables | Triple coaxial connectors + very fine coaxial cryogenic cable | |
leakage current | 100fA@1V In vacuum environment | |
signal frequency | DC-50MHz | |
Matching Impedance | 50 ohms | |
displacement range | X+/- 35mm, Y+/- 12.5m Z +/-6.5m R+/-10° |
X+/- 50mm,Y+/- 12.5m Z +/-6.5m R+/-10° |
optical system | ||
microscopic magnification | 10-180 times | |
resolution (of a photo) | 3 microns | |
field of view | 22mm | |
Working distance | 90-100mm | |
vacuum cavity | ||
makings | aluminum | |
Cavity Volume | 9L | 12L |
Overall size | 900*900*600 | 900*900*600 |
bore | 280mm | 280mm |
Window size | 50mm | 100mm |
Vacuum chamber window | Standard quartz window | |
window of radiation protection screen | Infrared absorption window | |
vacuum | 5E-4 torr | |
reserved interface | 2 probe arm interfaces & 2 electrical interfaces | |
Anti-radiation screen material | stainless steels | |
cooldown | 120 minutes to 5K | 150 minutes to 5K |
cooling source | GM Chillers | |
Specialized vibration isolation tables | ||
sizes | 800*800*800 | 900*900*800 |
desk push | Fixed Feet & Rollers |