Product Overview
Liquid nitrogen high and low temperature probe table plays a vital role in scientific research and technology development. It can perform various non-destructive physical and electrical property tests on samples in a low-temperature environment to help researchers gain a deeper understanding of the various physical and electrical properties of materials or devices, thus providing important data support for the research and development and application of new materials.
PSM-LN2 series liquid nitrogen high and low temperature probe stage can provide an 80K-800K high and low temperature vacuum test environment for the electrical parameter test of semiconductor chips. By connecting different electrical measurement instruments, it can complete the parameter test of voltage, current, resistance and IV curve of integrated circuits, which can be used for the non-destructive electrical test of chips, wafers and devices under the low-temperature vacuum environment.
specificities
- Liquid nitrogen high and low temperature vacuum probe table, within 15 minutes the cavity vacuum degree can reach 10E-4torr, liquid nitrogen consumption is small, down to the temperature of only 0.2L of liquid nitrogen, easy to use at the same time taking into account the economy.
- Displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing different devices on the sample to be switched for testing without destroying the vacuum.
- Unique probe arm X-Y-Z-R four-dimensional adjustment to accommodate testing of 4-inch samples.
- The vacuum cavity is made of aluminum, which can effectively reduce the external electromagnetic interference and improve the accuracy and stability of the test.
- Probe arm adopts tri-coaxial connector, good leakage performance, measured leakage current less than 100fA @1V@80K-800K
- Wide test temperature range, support 80K-800K continuous temperature change.
- Uniquely designed flexible probe, the probe is mounted on a copper shrapnel to avoid damage to the sample or electrode due to excessive force during the lancing process.
- The upper cover adopts flip cover structure, more convenient for sample change.
Technical Parameters
Parameters and indicators:
Probe Station Mainframe Classification | ||||
model number | PSM-LN2-2 | PSM-LN2-2H | PSM-LN2-4 | PSM-LN2-4H |
temperature range | 80K-500K | 80K-800K | 80K-500K | 80K-800K |
Temperature stability | +/-50mK | +/-100mk | +/-50mK | +/-100mk |
Specimen Holder | ||||
Types and Materials | Oxygen-free copper grounded gold-plated sample holders | Oxygen-free copper grounding sample holder | Oxygen-free copper grounding sample holder | Oxygen-free copper grounding sample holder |
sizes | 2 inch | 2 inch | 4 | 4 |
Optional specifications | Insulated sample holders (temperature only up to 400K) Coaxial sample holder (temperature only up to 400K) Triple coaxial sample holder (temperature only up to 400K) |
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probe arm | ||||
typology | DC Probe Arm | |||
quantities | 4 | |||
Connectors and Cables | Triple coaxial connectors + very fine coaxial cryogenic cable | |||
leakage current | 100fA@1V In vacuum environment | |||
signal frequency | DC-50MHz | |||
Matching Impedance | 50 ohms | |||
displacement range | Z +/-6.5m R+/-10° X+/- 50mm,Y+/- 12.5m |
X+/- 35mm, Y+/- 12.5m Z +/-6.5m R+/-10° |
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optical system | ||||
microscopic magnification | 10-180 times | |||
resolution (of a photo) | 3 microns | |||
field of view | 22mm | |||
Working distance | 90-100mm | |||
vacuum cavity | ||||
makings | aluminum | |||
Cavity Volume | 4L | 5.5L | ||
Overall size | 800*800*600 | 900*900*600 | ||
bore | 124mm | 155mm | ||
Window size | 50mm | 100mm | ||
Vacuum chamber window | Infrared absorption window | |||
window of radiation protection screen | N/A | Standard quartz window | N/A | Standard quartz window |
vacuum | 5*10E-4 torr | |||
reserved interface | 2 probe arm interfaces & 2 electrical interfaces | |||
Anti-radiation screen material | N/A | stainless steels | N/A | stainless steels |
Liquid Nitrogen Chamber | ||||
Liquid Nitrogen Capacity | 0.5L | |||
cooldown | 60 minutes to 80K | 80 minutes to 80K | ||
Liquid Nitrogen Consumption | 0.2L from room temperature to 80K | 0.3L from room temperature to 80K | ||
Liquid Nitrogen Holding Time | 4 hours @ 80K | 3 hours @ 80K | ||
Specialized vibration isolation tables | ||||
sizes | 800*800*800 | 900*900*800 | ||
desk push | Fixed Feet & Rollers |