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Capability.
- No need to make samples
- Minimum test defect size 10nm
- Test defect concentration range:105-109cm-3
- Epitaxial wafer testing available
- Maximum size of test specimen 300mm
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SIRM infrared body micro-defect analyzer
The SIRM is a non-contact and non-destructive optical inspection device that tests for body micro-defects such as oxide and metal deposits, dislocations, stacked laminations, slip lines and voids in the body material.
This technique can also be used to test composite materials such as GaAs and InP.
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