fluorescence spectrum
Microscopic defects film thickness
Solar Cell IV
Semiconductor Material Testing
Andor Spectrometer
fiber optic spectrometer
Laser spectral analysis
single-point detector
imaging camera
Electrical Test Instruments
EDMUND Optics
Newport Products
Crystal Optical Products
Capability.
- Automatic adjustment of objective lens
- Nanoscale movement
- More sensitive to defect concentration and size
- Test size: 20nm to 15nm
- Defect concentration:1e5-2.5e10cm–3
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LST body micro-defect test equipment
LST is a powerful tool for detecting bulk micro-defects in semiconductor materials, where information on the distribution of bulk micro-defects is obtained by scanning the scattering of incident light at the sample edges with a CCD camera.
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