PSM Series Standard Room Temperature Manual Probe Stations

Product Overview

The main purpose of the room temperature manual probe stage is to provide a test platform for the electrical parameter testing of semiconductor chips, external different measuring instruments, with the measuring instruments can be completed with the integrated circuit voltage, current, resistance, and capacitance-voltage characteristics of the curve and other parameters of the test, for the non-destructive testing of chips, wafers and devices at room temperature.

PSM series room temperature manual probe table is a high-quality probe table is able to carry out a large number of non-destructive, standard electrical experiments on 2-inch, 4-inch, 6-inch and 8-inch wafers, and the external connection of different test equipment can complete the electrical characterization, parameter measurement and DC measurement of the device. The scientific desktop design is the choice for academic and experimental research.

specificities
- Stabilized dual displacement adjustment system that adjusts the displacement of the sample holder and probe arm.
- The sample holders can hold 8-inch wafer samples with porous zoning for controlled gas adsorption fixation.
- The sliding table under the mobile sample holder can realize a travel of ±100mm in the X-Y axis, making sample testing and sample changing more convenient. The slide is fixed by magnetic attachment.
- 6 probe arms can be installed.
- The probe arms are attached by magnets and can be moved arbitrarily, and they can be fine-tuned in three dimensions for easy operation and precise pinning, and the probes of the four probe arms can be pinned to any position of the sample.
- The probe arm utilizes tri-coaxial cable and tri-coaxial connectors for low leakage currents, within 100fA.
- The CCD magnification is 180x and the working distance is 100mm.

Technical Parameters

Model classification:

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