fluorescence spectrum
Microscopic defects film thickness
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Capability.
- Minimum 0.1μm spot size to be monitored
- Wave number test range from 20 to 100 cm-1
- Synchronized ellipsometry and iSR testing allows for 2D high-resolution thickness mapping
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reflectance spectroscopy
iSR is a microspot testing technique for thickness testing in real-time etch and Halftone processes.
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